N B Sopher et al 2007 J. Micromech. Microeng. 17 2360 doi:10.1088/0960-1317/17/11/025
N B Sopher1,2, Z R Abrams1,2, M Reches3, E Gazit2,3 and Y Hanein1,2
Show affiliationsSelf-assembled peptide nanotubes are unique, newly developed nano-structures which exhibit many exciting properties that may establish them as preferred nano-technological building blocks, especially for nano-fluidics, biological sensing and self-assembly applications. Integrating peptide nanotube materials in standard micro-fabrication processes is inhibited by some of their specific characteristics, which make them susceptible to some of the chemicals used in standard lithography. Here, we present an adjusted photo-lithography compatible scheme that allows the integration of these novel new nano-materials in batch processing techniques. Specifically, a scheme for creating nano-fluidic channels using peptide nanotubes, as well as contacting nanotubes to electrodes, is demonstrated. In addition, some of the incompatible fabrication methods are delineated. The modified micro-fabrication processes described here can be extended to other types of sensitive nano-materials.
87.85.Qr Nanotechnologies-design
85.40.Hp Lithography, masks and pattern transfer
Issue 11 (November 2007)
Received 7 May 2007, in final form 2 September 2007
Published 17 October 2007
N B Sopher et al 2007 J. Micromech. Microeng. 17 2360
Henk N W Lekkerkerker and S Martijn Oversteegen 2002 J. Phys.: Condens. Matter 14 9317
Chui-Ping Yang et al 2004 J. Phys.: Condens. Matter 16 1907
Aparna Saxena et al 2003 J. Phys. D: Appl. Phys. 36 3168
I Jensen and A J Guttmann 1998 J. Phys. A: Math. Gen. 31 8137
G. Delamarter et al. 2000 ApJ 530 923
Matthias Schmidt 2004 J. Phys.: Condens. Matter 16 L351
E Fourkal et al 2003 Phys. Med. Biol. 48 3977
R Twarock 1999 J. Phys. A: Math. Gen. 32 4971
E. Schinnerer et al. 2000 ApJ 533 826