R Jackson Jr and R Ramadoss 2007 J. Micromech. Microeng. 17 1 doi:10.1088/0960-1317/17/1/001
R Jackson Jr and R Ramadoss
Show affiliationsThis paper reports a MEMS-based electrostatically tunable circular microstrip patch antenna. This antenna is fabricated using printed circuit processing techniques. The microstrip patch antenna is patterned on the top side of a Kapton polyimide film which is suspended above the ground plane. The resonant frequency of the antenna is tuned electrostatically by applying a dc bias voltage between the patch and the ground plane. The movable patch deflects downward toward the fixed ground plane due to electrostatic force of attraction caused by the applied dc bias voltage. This deflection decreases the air gap thereby increasing the effective permittivity of the antenna. This increase in effective permittivity results in a downward shift in the resonant frequency. The patch is inductively coupled to a coplanar waveguide (CPW) feed line via a slot in the ground plane. A 6 mm diameter circular patch antenna tunable from 16.91 GHz at 0 V to 16.64 GHz at 165 V, a tuning range of 270 MHz, is presented in this paper.
84.40.Ba Antennas: theory, components and accessories
84.40.Az Waveguides, transmission lines, striplines
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
41.20.Cv Electrostatics; Poisson and Laplace equations, boundary-value problems
Accelerators, beams and electromagnetism
Issue 1 (January 2007)
Received 17 July 2006, in final form 24 October 2006
Published 24 November 2006
R Jackson Jr and R Ramadoss 2007 J. Micromech. Microeng. 17 1
Jean-Pierre Wallerand et al 2006 Metrologia 43 294
Muraari Vasudevan et al 2005 Class. Quantum Grav. 22 339
Manfred Requardt 2002 J. Phys. A: Math. Gen. 35 759
S Abdullin et al 2002 J. Phys. G: Nucl. Part. Phys. 28 469
P Tavella and A Premoli 1994 Metrologia 30 479
A V Parisi 2005 Eur. J. Phys. 26 313
Jing Cai et al 2007 Phys. Med. Biol. 52 365
Mark Alford and Qinghai Wang 2005 J. Phys. G: Nucl. Part. Phys. 31 719
A Bauch et al 2006 Metrologia 43 109