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A MEMS-based electrostatically tunable circular microstrip patch antenna

R Jackson Jr and R Ramadoss

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This paper reports a MEMS-based electrostatically tunable circular microstrip patch antenna. This antenna is fabricated using printed circuit processing techniques. The microstrip patch antenna is patterned on the top side of a Kapton polyimide film which is suspended above the ground plane. The resonant frequency of the antenna is tuned electrostatically by applying a dc bias voltage between the patch and the ground plane. The movable patch deflects downward toward the fixed ground plane due to electrostatic force of attraction caused by the applied dc bias voltage. This deflection decreases the air gap thereby increasing the effective permittivity of the antenna. This increase in effective permittivity results in a downward shift in the resonant frequency. The patch is inductively coupled to a coplanar waveguide (CPW) feed line via a slot in the ground plane. A 6 mm diameter circular patch antenna tunable from 16.91 GHz at 0 V to 16.64 GHz at 165 V, a tuning range of 270 MHz, is presented in this paper.


PACS

84.40.Ba Antennas: theory, components and accessories

84.40.Az Waveguides, transmission lines, striplines

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

41.20.Cv Electrostatics; Poisson and Laplace equations, boundary-value problems

77.22.Ch Permittivity (dielectric function)

Subjects

Accelerators, beams and electromagnetism

Condensed matter: electrical, magnetic and optical

Electronics and devices

Nanoscale science and low-D systems

Dates

Issue 1 (January 2007)

Received 17 July 2006, in final form 24 October 2006

Published 24 November 2006



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