Tomokazu Takahashi et al 2006 J. Micromech. Microeng. 16 S206 doi:10.1088/0960-1317/16/9/S06
Tomokazu Takahashi, Shuji Tanaka and Masayoshi Esashi
Show affiliationsThe microfuel reformer with a suspended membrane structure can realize excellent thermal isolation of the reaction area on the suspended membrane because heat conduction through the thin suspended membrane is quite small. However, it is difficult to form an effective catalyst selectively on the suspended membrane. The solution can be given by an in situ chemical vapor deposition (CVD) method by which alumina is deposited from an alumina precursor selectively on the suspended membrane heated by integrated micro-heaters. The deposits were evaluated by scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDX). Self-sustaining hydrogen combustion was demonstrated on the deposited alumina catalyst bed with platinum. The heated area was localized just on the membrane, and temperature difference between the membrane and the bulk substrate reached 570 K, when the temperature of the membrane was 670 °C. The maximum space velocity (SV) value allowable for the formed catalyst was approximately 680 000 h−1.
81.15.Gh Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.)
82.47.Pm Phosphoric-acid fuel cells (PAFC); other fuel cells
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
Issue 9 (September 2006)
Received 20 January 2006
Published 9 August 2006
Tomokazu Takahashi et al 2006 J. Micromech. Microeng. 16 S206
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Jing Ma and X. L. Lei 2004 Europhys. Lett. 67 432
Ann-Marie Mårtensson-Pendrill 2006 Phys. Educ. 41 493
M Tabellout et al 2006 J. Phys.: Condens. Matter 18 1143
Jan Hannig et al 2007 Metrologia 44 476
Youichi Bitou et al 2008 Metrologia 45 21
Stéphane Nonnenmacher 2008 Nonlinearity 21 T113
E Massa et al 2009 Metrologia 46 249