Quick search Find article
Quick search
Find article

Cantilever beam electrostatic MEMS actuators beyond pull-in

Subrahmanyam Gorthi1, Atanu Mohanty1 and Anindya Chatterjee2

Show affiliations


The operational range of electrostatic MEMS parallel plate actuators can be extended beyond pull-in in the presence of an intermediate dielectric layer, which has a significant effect on the behavior of such actuators. Here, we study the behavior of cantilever beam electrostatic actuators beyond pull-in using a beam model along with a dielectric layer. The results from the simple beam model are validated with 3D simulations performed in CoventorWare™. Three possible static configurations of the beam are identified over the operational voltage range. We call them floating, pinned and flat; the latter two are also called arc-type and S-type in the literature. We compute the voltage ranges over which the three configurations can exist and the points where transitions occur between these configurations. Voltage ranges are identified where bi-stable and tri-stable states exist. A classification of all possible transitions (pull-in and pull-out as well as transitions we term pull-down and pull-up) is presented based on the dielectric layer parameters. Dynamic stability analyses are presented for the floating and pinned configurations. For high dielectric layer thickness, discontinuous transitions between configurations disappear and the actuator has smooth predictable behavior, but at the expense of lower overall tunability.


PACS

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

02.70.Dh Finite-element and Galerkin methods

07.07.Tw Servo and control equipment; robots

02.60.Lj Ordinary and partial differential equations; boundary value problems

Subjects

Computational physics

Electronics and devices

Instrumentation and measurement

Nanoscale science and low-D systems

Dates

Issue 9 (September 2006)

Received 25 May 2006, in final form 28 June 2006

Published 26 July 2006



  1. Cantilever beam electrostatic MEMS actuators beyond pull-in

    Subrahmanyam Gorthi et al 2006 J. Micromech. Microeng. 16 1800

  2. Optical properties of GaN nanorods grown by molecular-beam epitaxy; dependence on growth time

    C M Park et al 2006 Nanotechnology 17 952

  3. The influence of gamma radiation on the electro-optical characteristics of CR-39 polymer

    S Eren San 2005 J. Radiol. Prot. 25 93

  4. Life, the universe(s) and everything

    Ken Dobson 1998 Phys. Educ. 33 330

  5. Cosmic-ray spectra near the LISA orbit

    C Grimani et al 2004 Class. Quantum Grav. 21 S629

  6. High-resolution SAR modelling for regional hyperthermia: testing quasistatic zooming at 10 MHz

    J B Van de Kamer et al 2001 Phys. Med. Biol. 46 183

  7. Extended phase spaces and twistor theory

    A Bette and S Zakrzewski 1997 J. Phys. A: Math. Gen. 30 195

  8. Fabrication of all-polymer freestanding waveguides

    Róbert Horváth et al 2003 J. Micromech. Microeng. 13 419

  9. Anomalous tunneling of bound pairs in crystal lattices

    V. L. Bulatov and P. E. Kornilovitch 2005 Europhys. Lett. 71 352

  10. Gravitational waves from relativistic rotational core collapse in axisymmetry

    H Dimmelmeier et al 2002 Class. Quantum Grav. 19 1291

View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.