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Tunable microfluidic optical devices with an integrated microlens array

Kuang-Sheng Hong1, Jing Wang2, Alexey Sharonov3, Dinesh Chandra1, Joanna Aizenberg4 and Shu Yang1

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Interest in dynamically tuning light has attracted great attention to the fabrication of tunable microlens arrays. Here we discuss the fabrication and characterization of a simple, robust, yet tunable microfluidic optical device with an integrated microlens array. The microfluidic device with a desired channel structure was micromachined on a polycarbonate plate with a resolution of up to 100 µm, followed by thermal bonding two plates above their glass transition temperature. The microlens arrays were replica molded on a glass slide, which was then attached to the polycarbonate plates. By simply actuating the liquids with variable refractive index into the fluidic channel to immerse the lens arrays without moving or deformation of microlenses, a large change of focal length of more than ten times (f = 0.74–8.53) was achieved. When a dye-containing liquid was pumped into the microfluidic channel to cover the lenses, the light transmission through the lenses was reduced from about 95% to 55% when the dye concentration was increased to 10 w/v%. The knowledge we gain from these studies will provide important insights to construct new, adaptive, micro-scale optical devices with multiple functionalities.


PACS

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

42.79.Bh Lenses, prisms and mirrors

42.82.Et Waveguides, couplers, and arrays

42.82.Cr Fabrication techniques; lithography, pattern transfer

Subjects

Electronics and devices

Optics, quantum optics and lasers

Nanoscale science and low-D systems

Dates

Issue 8 (August 2006)

Received 4 May 2006, in final form 15 June 2006

Published 11 July 2006



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