Marco J F Zeman et al 2006 J. Micromech. Microeng. 16 1540 doi:10.1088/0960-1317/16/8/014
Marco J F Zeman1,2, Evgueni V Bordatchev1,2 and George K Knopf1
Show affiliationsMicrogripping systems incorporate miniature end-effectors used to manipulate micro-sized objects such as tiny mechanical parts, electrical components, biological cells and bacteria. This paper presents a thorough study of the design, kinematics and static/dynamic performances, including electro-thermo performance characteristics, of the new microgripping system. The developed microgripper had a monolithic design which consisted of a combination of an in-plane electro-thermally driven microactuator and a compliant tweezing mechanism. The kinematics of the microgripper was studied as a transformation of input linear actuation motions into output tweezing displacements and compared with microgripper prototypes fabricated from 25 µm thick nickel foil by using laser micromachining technology. The static, dynamic and electro-thermal characteristics of the system performance were analyzed with respect to actual actuation motions, tweezing displacements, voltage, power, electric resistance and overall temperature under constant applied current within a range of {20, 40, ..., 160} mA. Maximum tweezing displacements of 47.5 µm (tweezing gap of 94.9 µm) were achieved under an applied current of 160 mA for a fabricated microgripper having a transform coefficient K = 1.731. The repeatability and reliability of the fabricated microgripper were also tested along with the capability to grip, hold and release a 110 µm diameter glass bead proving that this microgripper can be utilized as a grasping end-effector for micromanipulation, microrobotic and microassembly applications.
07.07.Tw Servo and control equipment; robots
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 8 (August 2006)
Received 5 August 2005, in final form 30 May 2006
Published 26 June 2006
Marco J F Zeman et al 2006 J. Micromech. Microeng. 16 1540
Chenpeng Hsu and Wensyang Hsu 2003 J. Micromech. Microeng. 13 955
I E Chupis and D A Mamaluy 2000 J. Phys.: Condens. Matter 12 1413
B Jakobsson 1993 Phys. Scr. 48 179
E L Bialas et al 1977 Phys. Med. Biol. 22 1202
Jin Li and Thomas S Denney Jr 2006 Phys. Med. Biol. 51 517
Gennady Stupakov 2006 New J. Phys. 8 280
Dagang Wu et al 2007 Phys. Med. Biol. 52 5735
V Yu Bychenkov and V F Kovalev 2005 Quantum Electron. 35 1143
Alexei A. Pevtsov and Sergei M. Latushko 2000 ApJ 528 999