Kwang W Oh and Chong H Ahn 2006 J. Micromech. Microeng. 16 R13 doi:10.1088/0960-1317/16/5/R01
Kwang W Oh1,3 and Chong H Ahn2
Show affiliationsThis review gives a brief overview of microvalves, and focuses on the actuation mechanisms and their applications. One of the stumbling blocks for successful miniaturization and commercialization of fully integrated microfluidic systems was the development of reliable microvalves. Applications of the microvalves include flow regulation, on/off switching and sealing of liquids, gases or vacuums. Microvalves have been developed in the form of active or passive microvalves employing mechanical, non-mechanical and external systems. Even though great progress has been made during the last 20 years, there is plenty of room for further improving the performance of existing microvalves.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
47.61.Fg Flows in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS)
Issue 5 (May 2006)
Received 7 September 2005, in final form 5 January 2006
Published 24 March 2006
Kwang W Oh and Chong H Ahn 2006 J. Micromech. Microeng. 16 R13
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