Bo Hyun Kim et al 2006 J. Micromech. Microeng. 16 843 doi:10.1088/0960-1317/16/4/022
Bo Hyun Kim, Byung Jin Park and Chong Nam Chu
Show affiliationsMicro electrodes of various shapes were fabricated by reverse electrical discharge machining (REDM). The machining characteristics of REDM were investigated under varying capacitances and applied voltages, and optimal conditions for stable machining were suggested. Multiple-tipped micro electrodes fabricated by REDM were then introduced for micro electrochemical machining in order to increase productivity over single micro electrodes. By using various multiple electrodes, micro hole arrays, grooves and channels were machined on stainless steel.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Nanoscale science and low-D systems
Issue 4 (April 2006)
Received 30 November 2005, in final form 8 February 2006
Published 20 March 2006
Bo Hyun Kim et al 2006 J. Micromech. Microeng. 16 843
S Chakrabarti et al 2003 J. Phys. D: Appl. Phys. 36 146
S Ochiai et al 2007 Supercond. Sci. Technol. 20 202
S D Steenwyk et al 1981 J. Phys. F: Met. Phys. 11 1623
U. Buchenau and R. Zorn 1992 Europhys. Lett. 18 523
S. Mattila et al 2007 ApJ 659 L9
E. Steinbring et al. 2004 ApJS 155 15
Amel Ben Abda et al 2002 Inverse Problems 18 1057
Joseph J Végh and David B Graves 2009 J. Phys. D: Appl. Phys. 42 222001
K C Fan et al 2006 Meas. Sci. Technol. 17 524