Soo Ho Kim et al 2006 J. Micromech. Microeng. 16 526 doi:10.1088/0960-1317/16/3/007
Soo Ho Kim1, Jermim Noh1, Min Ku Jeon1, Ki Woong Kim1, Luke P Lee2 and Seong Ihl Woo1
Show affiliationsThe temperature distribution inside the microchannel was first measured using a micro-Raman spectroscopy system. Polymerase chain reaction (PCR) inside the microchannel, which is very sensitive to temperature change, was chosen to validate a novel thermometry. The micro PCR chip was fabricated by silicon micromachining. The microchip consisted of a microchannel inside the chip, a Pt film heater and a Pt film sensor on the silicon surface. The O–H stretch vibration mode of water was analyzed using a micro-Raman spectroscopy system. Its spectral changes were calibrated with temperature. The intensity ratio of the hydrogen-bonded (HB) to non-hydrogen-bonded (NHB) O–H stretch vibration modes has a linear relation with temperature. The temperature of the microchannel controlled at 55 °C varied from 53.6 to 54.8 °C depending on the location of the microchannel.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 3 (March 2006)
Received 1 August 2005, in final form 6 January 2006
Published 6 February 2006
Soo Ho Kim et al 2006 J. Micromech. Microeng. 16 526
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