Quick search Find article
Quick search
Find article

Investigation of the response of microstructures under the combined effect of mechanical shock and electrostatic forces

Mohammad I Younis, Ronald Miles and Daniel Jordy

Show affiliations


There is strong experimental evidence for the existence of strange modes of failure of microelectromechanical systems (MEMS) devices under mechanical shock and impact. Such failures have not been explained with conventional models of MEMS. These failures are characterized by overlaps between moving microstructures and stationary electrodes, which cause electrical shorts. This work presents modeling and simulation of MEMS devices under the combination of shock loads and electrostatic actuation, which sheds light on the influence of these forces on the pull-in instability. Our results indicate that the reported strange failures can be attributed to early dynamic pull-in instability. The results show that the combination of a shock load and an electrostatic actuation makes the instability threshold much lower than the threshold predicted, considering the effect of shock alone or electrostatic actuation alone. In this work, a single-degree-of-freedom model is utilized to investigate the effect of the shock–electrostatic interaction on the response of MEMS devices. Then, a reduced-order model is used to demonstrate the effect of this interaction on MEMS devices employing cantilever and clamped–clamped microbeams. The results of the reduced-order model are verified by comparing with finite-element predictions. It is shown that the shock–electrostatic interaction can be used to design smart MEMS switches triggered at a predetermined level of shock and acceleration.


PACS

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

Subjects

Electronics and devices

Nanoscale science and low-D systems

Dates

Issue 11 (November 2006)

Received 2 August 2006, in final form 3 September 2006

Published 4 October 2006



View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.