M Dijkstra et al 2005 J. Micromech. Microeng. 15 S132 doi:10.1088/0960-1317/15/7/019
M Dijkstra, J J van Baar, R J Wiegerink, T S J Lammerink, J H de Boer and G J M Krijnen
Show affiliationsThis paper presents the modelling, design, fabrication and characterization of flow sensors based on the wind-receptor hairs of crickets. Cricket sensory hairs are highly sensitive to drag-forces exerted on the hair shaft. Artificial sensory hairs have been realized in SU-8 on suspended SixNy membranes. The movement of the membranes is detected capacitively. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept.
87.19.lt Sensory systems: visual, auditory, tactile, taste, and olfaction
Issue 7 (July 2005)
Received 25 December 2004, in final form 24 February 2005
Published 20 June 2005
M Dijkstra et al 2005 J. Micromech. Microeng. 15 S132
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