Chieh Chang et al 2005 J. Micromech. Microeng. 15 812 doi:10.1088/0960-1317/15/4/020
Chieh Chang1, Chia-Fang Chiang1, Cheng-Hsiang Liu1 and Cheng-Hsien Liu1,2
Show affiliationsWe learn from nature to mimic, from the viewpoint of controlling Reynolds number variations, the odor-molecule capturing function of lobsters' tiny hairs on their antennules for finding food, a suitable mate or to avoid predators to capture molecules from the surrounding fluid. The engineering implementation of this lobster-hair-like capturing device, which is actuated by the electrostatic force, is reported in this paper. The device actuates and drives the biological objects via disturbing the fluid field and manipulating the Reynolds number of the surrounding fluid to achieve the function of micro-object manipulation. The operation principle of this micro-object manipulation is very different from those of other researchers' early work such as MEMS ciliary actuators. In this paper, both theoretical analyses and simplified numerical simulations are presented to obtain the design criteria as well as the microfabrication processes. Preliminary experimental results are also shown to demonstrate the feasibility and functionality via the micro-object manipulation in liquid environment. These biomimetic electrostatic bimorph actuators could avoid some of the drawbacks of conventional tools and are potential tools for the non-contact and non-invasive manipulation of micro/nano bio-objects.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
85.65.+h Molecular electronic devices
Issue 4 (April 2005)
Received 15 November 2004, in final form 19 January 2005
Published 25 February 2005
Chieh Chang et al 2005 J. Micromech. Microeng. 15 812
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