Neal B Hubbard et al 2005 J. Micromech. Microeng. 15 720 doi:10.1088/0960-1317/15/4/008
Neal B Hubbard1, Larry L Howell1, John P Barber2, Donald B Conkey2, Aaron R Hawkins2 and Holger Schmidt3
Show affiliationsThis paper provides a structural analysis of hollow silicon dioxide micro-channels that have applications in microfluidics and photonics. A specific fabrication method is highlighted that uses aluminum as a sacrificial material. Possible causes of failures that occur during fabrication are investigated, and internal pressure produced during the fabrication process is identified as the most likely failure mechanism. Three models are developed for the fabricated micro-channels. Models based on elementary beam theory and energy methods verify a nonlinear finite element model. Design parameters in the finite element model are varied to investigate which have the greatest effect on structural strength and ultimate failure. Experimental results are used with the model to estimate the pressure at failure. Finally, based on the model and experimental results, a rule is developed for the design of the hollow micro-channels described in the paper: maintain the width-to-thickness ratio below 35.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 4 (April 2005)
Received 19 October 2004, in final form 25 November 2004
Published 2 February 2005
Neal B Hubbard et al 2005 J. Micromech. Microeng. 15 720
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