Quick search Find article
Quick search
Find article

Modeling and design of variable-geometry electrostatic microactuators

F Najar1, S Choura1, S El-Borgi1, E M Abdel-Rahman2 and A H Nayfeh2

Show affiliations


We model and analyze the deflections and motions of a shaped microbeam in a capacitive-based MEMS device. The model accounts for the system nonlinearities including mid-plane stretching and electrostatic forcing. The differential quadrature method (DQM) is used to discretize the microbeam partial differential equation. It is shown that the use of 11 grid points in the DQM is sufficient to capture the response of the device. It is also observed that, unlike the shooting methods, DQM does not face the problems of system differential equations stiffness and solution sensitivity to the initial guess. The static response to a dc voltage is first determined to investigate the influence of varying the geometric parameters of the device on the range of travel and pull-in voltage. Analytical expressions approximating the range of travel and pull-in voltage, as functions of the capacitor gap size and microbeam width and thickness, are derived. Symmetric and asymmetric spatial distributions of these parameters are considered. For symmetric distribution, an increase (decrease) in the beam width and/or thickness at the middle with respect to those at the endpoints results in an increase (decrease) in the pull-in voltage and a decrease (increase) in the range of travel. An increase (decrease) in the gap size at the middle with respect to those at the endpoints results in an increase (decrease) in the pull-in voltage and an insignificant effect on the range of travel. The dynamic response of the microbeam to a dc voltage is also determined for various distributions of the microbeam width and thickness and the gap size. It is shown that decreasing the microbeam thickness at the middle is the most effective method to reduce the pull-in time.


PACS

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

02.30.Cj Measure and integration

02.30.Jr Partial differential equations

Subjects

Mathematical physics

Electronics and devices

Nanoscale science and low-D systems

Dates

Issue 3 (March 2005)

Received 9 June 2004, in final form 26 October 2004

Published 16 December 2004



  1. Modeling and design of variable-geometry electrostatic microactuators

    F Najar et al 2005 J. Micromech. Microeng. 15 419

  2. Observables and gauge invariance in the theory of nonlinear spacetime perturbations

    Marco Bruni and Sebastiano Sonego 1999 Class. Quantum Grav. 16 L29

  3. High-order above-threshold multiphoton detachment of H: time-dependent non-Hermitian Floquet approach

    Dmitry A Telnov and Shih-I Chu 2004 J. Phys. B: At. Mol. Opt. Phys. 37 1489

  4. Nanostructured chiral surfaces

    K-H Ernst et al 1999 Nanotechnology 10 355

  5. Transition from resonances to bound states in nonlinear systems: application to Bose–Einstein condensates

    Nimrod Moiseyev et al 2004 J. Phys. B: At. Mol. Opt. Phys. 37 L193

  6. Half-inverse problems on the finite interval

    L Sakhnovich 2001 Inverse Problems 17 527

  7. Equivariant Hopf bifurcation in a ring of identical cells with delayed coupling

    Sue Ann Campbell et al 2005 Nonlinearity 18 2827

  8. Fabrication of nanopillars by nanosphere lithography

    C L Cheung et al 2006 Nanotechnology 17 1339

  9. Science, engineering and technology—it is a military affair

    Chris Langley 2006 Phys. Educ. 41 508

  10. Finite-time singularity versus global regularity for hyper-viscous Hamilton–Jacobi-like equations

    Hamid Bellout et al 2003 Nonlinearity 16 1967

View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.