Tamara Bechtold et al 2005 J. Micromech. Microeng. 15 R17 doi:10.1088/0960-1317/15/11/R01
Dynamic electro-thermal simulation of microsystems—a review
REVIEW ARTICLETamara Bechtold, Evgenii B Rudnyi and Jan G Korvink
Show affiliationsTOPICAL REVIEW
An overview of electro-thermal modeling of microsystems is presented. We consider the most important coupling between thermal and electrical phenomena, and then focus on the industry's central concern, that of Joule heating. A description of different solution approaches for the heat transfer partial differential equation, which constitutes the central part of electro-thermal simulation, is given. We briefly review the analytical solutions and consider further the numerical approaches, which are based on spatial discretization of the thermal domain. Lastly, we describe the final level of approximation, the dynamic compact thermal modeling. We emphasize the formal model order reduction methods, because they directly follow the spatial discretization, and thus preserve the investment into the finite element modeling.
- PACS
-
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
02.70.Dh Finite-element and Galerkin methods
02.60.Lj Ordinary and partial differential equations; boundary value problems
- Subjects
- Dates
-
Issue 11 (November 2005)
Received 30 May 2005, in final form 29 July 2005
Published 17 October 2005
-
Dynamic electro-thermal simulation of microsystems—a review
Tamara Bechtold et al 2005 J. Micromech. Microeng. 15 R17
-
The resonant photoionisation of hydrogen atom in intense magnetic fields
S K Bhattacharya and S -I Chu 1985 J. Phys. B: At. Mol. Phys. 18 L275
-
Electron impact excitation out of the metastable levels of argon into the
level
John B Boffard et al 1996 J. Phys. B: At. Mol. Opt. Phys. 29 L795
-
Green's function theory of the two-dimensional antiferromagnetic Heisenberg model with local magnetic impurities
Yun Song et al 2000 J. Phys.: Condens. Matter 12 5275
-
LISA technology—concept, status, prospects
Karsten Danzmann and Albrecht Rüdiger 2003 Class. Quantum Grav. 20 S1
-
The spatial structure of the lowest ion-acoustic instability modes in the high-current discharge of CW argon ion lasers
V I Donin et al 2003 J. Phys. D: Appl. Phys. 36 2366
-
Free vortex and vortex-pair lifetimes in classical two-dimensional easy-plane magnets
D A Dimitrov and G M Wysin 1998 J. Phys.: Condens. Matter 10 7453
-
Raman study of orientational dynamics of sulphate ions in potash alum Dattagupta,
A K Sood et al 1981 J. Phys. C: Solid State Phys. 14 5215
-
The perimeter generating function of punctured staircase polygons
Anthony J Guttmann and Iwan Jensen 2006 J. Phys. A: Math. Gen. 39 3871
-
Cosmic Strings and Quintessence
Duan Yi-Shi et al 2003 Chinese Phys. Lett. 20 2133
Users also read
What's this?- Thin-Film Planar Gradiometer with Long Baseline
- Semiconductor sensors for the CALICE SiW EMC and study of the cross-talk between guard rings and pixels in the CALICE SiW prototype
- Architecture of a silicon strip beam position monitor
Related review articles
What's this?- A review of MEMS oscillators for frequency reference and timing applications
- A review of micro-powder injection moulding as a microfabrication technique
- Pneumatic and hydraulic microactuators: a review