Imed Zine-El-Abidine et al 2005 J. Micromech. Microeng. 15 2063 doi:10.1088/0960-1317/15/11/010
Imed Zine-El-Abidine1,2, Michal Okoniewski1 and John G McRory2
Show affiliationsWe have developed a CMOS-compatible micromachining process that allows us to build high quality, tunable radio frequency inductors. Inductors play a key role in wireless front ends; the additional flexibility offered by tunability can offer adaptability to devices such as filters, matching circuits and voltage-controlled oscillators. Our inductors have a tuning range of up to 30% with a quality factor of 25 and self-resonance over 35 GHz.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 11 (November 2005)
Received 24 June 2005, in final form 17 August 2005
Published 20 September 2005
Imed Zine-El-Abidine et al 2005 J. Micromech. Microeng. 15 2063
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