Henrik Rödjegård et al 2005 J. Micromech. Microeng. 15 1989 doi:10.1088/0960-1317/15/11/001
Henrik Rödjegård, Gert I Andersson, Cristina Rusu, Mikael Löfgren1 and Dag Billger
Show affiliationsThree-axis accelerometers based on four separate seismic masses, each one suspended on a slanted beam, have previously been shown to have identical resolution and frequency responses in all directions. Here, a new and in-depth model of such accelerometers is presented. The theoretical model incorporates non-ideal effects such as the finite aspect ratio of the beam and the frequency-dependent squeezed gas-film damping. Sensitivity, resolution, transverse sensitivity and process errors are discussed. Prototype devices have been fabricated in a straightforward silicon process.
Issue 11 (November 2005)
Received 25 January 2005, in final form 31 August 2005
Published 20 September 2005
Henrik Rödjegård et al 2005 J. Micromech. Microeng. 15 1989
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