Takahito Ono et al 2005 J. Micromech. Microeng. 15 1 doi:10.1088/0960-1317/15/1/001
Takahito Ono1, Chia-cheng Fan1 and Masayoshi Esashi2
Show affiliationsA micro tool for evaluating thermoelectric properties of low-dimensional materials is developed. It is expected that a one-dimensional thermoelectric material exhibits superior thermoelectric properties and low thermal conductivity due to its inherent nanoscale structure. By using these superior properties, high efficient thermoelectric power transformation devices may be realized. In this study, we developed micro instrumentation fabricated by micromachining for the characterization of thermoelectric properties of low-dimensional materials. The device consists of freely suspended heating elements and built-in microthermocouple as a sensing element on the heating elements. A bundle of Bi2Te3 nanowire, which is prepared by a silicon template method, was positioned onto the microdevice by manipulation. Measurements of the electric conductivity, thermal conductivity and Seebeck coefficient of the Bi2Te3 bundle were performed to show the feasibility of this device for measurements of thermoelectric properties of nanomaterials.
81.07.-b Nanoscale materials and structures: fabrication and characterization
81.16.-c Methods of nanofabrication and processing
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Instrumentation and measurement
Issue 1 (January 2005)
Received 7 May 2004, in final form 9 August 2004
Published 23 September 2004
Takahito Ono et al 2005 J. Micromech. Microeng. 15 1
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