Guo-Hua Feng and Eun Sok Kim 2004 J. Micromech. Microeng. 14 429 doi:10.1088/0960-1317/14/4/001
Guo-Hua Feng and Eun Sok Kim
Show affiliationsThis paper describes a micropump composed of a piezoelectric PZT unimorph and one-way parylene valves. Two different designs of the valves (cantilever- and bridge-type) are studied, fabricated and tested. The micropump (13 × 13 × 1.2 mm3 in size) is capable of pumping liquid up to 700 μL min−1 with its pumping speed being insensitive to a backpressure up to 2.5 kPa. The flow rate of 700 μL min−1 is obtained when the micropump is driven with square pulses at 6 kHz with 50% duty cycle and 100 V peak-to-peak. The maximum static pumping pressure is measured to be 4 kPa.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
77.84.-s Dielectric, piezoelectric, ferroelectric, and antiferroelectric materials
Soft matter, liquids and polymers
Issue 4 (April 2004)
Received 3 May 2003, in final form 28 November 2003
Published 9 January 2004
Guo-Hua Feng and Eun Sok Kim 2004 J. Micromech. Microeng. 14 429
Terry Rudolph and Shashank Soyuz Virmani 2005 New J. Phys. 7 228
Roberto Giambo et al 2003 Class. Quantum Grav. 20 L75
Sergei Maslov et al 2007 New J. Phys. 9 273
Cliff P. Burgess et al JHEP10(2002)028
Shamit Kachru et al JCAP10(2003)013
Chiang-Mei Chen et al JHEP11(2006)044
Chiang-Mei Chen et al JHEP10(2003)058
Alex Buchel and Johannes Walcher JHEP05(2003)069
Clifford P. Burgess et al JHEP03(2003)050