Detlef Snakenborg et al 2004 J. Micromech. Microeng. 14 182 doi:10.1088/0960-1317/14/2/003
Microstructure fabrication with a CO2 laser system
Detlef Snakenborg, Henning Klank and Jörg P Kutter
Show affiliationsIn this paper, we investigate the use of a commercial CO2 laser system for fabrication of microfluidic systems in polymers. We discuss the cutting process with the laser system and present a straightforward model for the channel depth of microchannels dependent on the fabrication parameters. In particular, we examine the influence of the cutting sequence, the number of cut passes, the laser beam velocity and the laser radiant flux. The model allows the prediction of microchannel depths within a maximum deviation of 8 µm for channels that are up to 210 µm in depths. It was shown that, at constant channel depth, the channel width could be varied by 27% by using different cutting parameters. The optimum cutting sequence for the production of a channel 
-junction is also presented in the paper. The laser system is shown to be a flexible and rapid tool for the production of polymer microfluidic prototypes.
- PACS
-
42.55.Lt Gas lasers including excimer and metal-vapor lasers
42.60.By Design of specific laser systems
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
42.60.Jf Beam characteristics: profile, intensity, and power; spatial pattern formation
- Subjects
- Dates
-
Issue 2 (February 2004)
Received 15 July 2003, in final form 8 August 2003
Published 15 October 2003
-
Microstructure fabrication with a CO2 laser system
Detlef Snakenborg et al 2004 J. Micromech. Microeng. 14 182
-
Time-resolved photoluminescence spectroscopy of ligand-capped PbS nanocrystals
Jamie H Warner et al 2005 Nanotechnology 16 175
-
Evaluation of coaxial bridge systems for accurate determination of the SI Farad from the DC quantum Hall effect
S A Awan et al 2003 Metrologia 40 264
-
Negative thermal expansion and local dynamics
P Fornasini et al 2009 J. Phys.: Conf. Ser. 190 012025
-
Composed ensembles of random unitary matrices
Marcin Pozniak et al 1998 J. Phys. A: Math. Gen. 31 1059
-
L-shell x-ray fluorescence measurements of lead in bone: system development
Andrew C Todd 2002 Phys. Med. Biol. 47 507
-
Crazy things that we teach in physics
Keith S Taber 2008 Phys. Educ. 43 122
-
A simple proof of uniqueness of the particle trajectories for solutions of the Navier–Stokes equations
M Dashti and J C Robinson 2009 Nonlinearity 22 735
-
Mass-spectrometric analysis of hypersonic flows
K C A Crane and R J Stalker 1977 J. Phys. D: Appl. Phys. 10 679
-
Perturbative evaluation of the zero-point function for self-interacting scalar field on a manifold with boundary
George Tsoupros 2002 Class. Quantum Grav. 19 767
Users also read
What's this?Related review articles
What's this?- Horizons of petawatt laser technology
- Optical Department of the Lebedev Physical Institute: early work on lasers
- High-power semiconductor separate-confinement double heterostructure lasers