Quick search Find article
Quick search
Find article

Design and fabrication of a direction sensitive MEMS shear stress sensor with high spatial and temporal resolution

A V Desai and M A Haque

Show affiliations


Shear stress at the fluid–wall interface is one of the most frequently studied parameters in fluid dynamics. It is also a parameter of very small magnitude and calls for high resolution force sensors. Macroscopic sensors compromise dynamic bandwidth for the required high resolution and therefore cannot resolve shear stress data in space and/or time, which is very important for fundamental understanding in non-laminar fluid dynamics. We exploit the linear reduction in stiffness accompanied by cubic reduction in mass by miniaturization to design and fabricate a novel micro-electro-mechanical sensor (MEMS) for direct measurement of shear stress along and across the direction of fluid flow, with 0.01 Pa resolution and 50 kHz bandwidth along the flow. The mechanical component of the sensor is a floating beam element and capacitive comb drives supported by an in-plane torsional spring. A resonant RLC circuit, capable of sub-femtofarad capacitive sensing, is used to sense the displacement in the floating beam under shear. Fabrication of the sensor is demonstrated using silicon-on wafer (SOI) technology. The small overall size of the sensor, wide range of measurement, large bandwidth and high spatial and temporal resolution will make it useful in a wide variety of civil and military applications such as aerospace, automotive, marine and biomedical.


PACS

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

47.27.nb Boundary layer turbulence

47.85.Np Fluidics

84.30.-r Electronic circuits

07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

Subjects

Fluid dynamics

Electronics and devices

Instrumentation and measurement

Nanoscale science and low-D systems

Dates

Issue 12 (December 2004)

Received 22 March 2004, in final form 16 August 2004

Published 23 September 2004



  1. Design and fabrication of a direction sensitive MEMS shear stress sensor with high spatial and temporal resolution

    A V Desai and M A Haque 2004 J. Micromech. Microeng. 14 1718

  2. Representations of coherent and squeezed states in a f-deformed Fock space

    R Roknizadeh and M K Tavassoly 2004 J. Phys. A: Math. Gen. 37 5649

  3. Corrections and comments on the multipole moments of axisymmetric electrovacuum spacetimes

    Thomas P Sotiriou and Theocharis A Apostolatos 2004 Class. Quantum Grav. 21 5727

  4. The AGASA and SUGAR Anisotropies and TeV Gamma Rays from the Galactic Center: A Possible Signature of Extremely High Energy Neutrons

    Roland M. Crocker et al. 2005 ApJ 622 892

  5. CO Images of the Central Regions of 20 Nearby Spiral Galaxies

    Kazushi Sakamoto et al. 1999 ApJS 124 403

  6. Deuterium thermal desorption from FeAl thin films

    R Checchetto et al 2002 J. Phys.: Condens. Matter 14 6307

  7. Chandra Detection of the First X-Ray Forest along the Line of Sight to Markarian 421

    Fabrizio Nicastro et al. 2005 ApJ 629 700

  8. An XMM-Newton Observation of the High Magnetic Field Radio Pulsar PSR B0154+61

    M. E. Gonzalez et al 2004 ApJ 610 L37

  9. Microscopic structure of the 90° and 30° partial dislocations in gallium arsenide

    João F Justo et al 2002 J. Phys.: Condens. Matter 14 12749

  10. Random tilings: concepts and examples

    C Richard et al 1998 J. Phys. A: Math. Gen. 31 6385

View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.