R R A Syms et al 2004 J. Micromech. Microeng. 14 1700 doi:10.1088/0960-1317/14/12/015
Sliding-blade MEMS iris and variable optical attenuator
R R A Syms, H Zou, J Stagg and H Veladi
Show affiliationsAn iris-type variable aperture fabricated using microelectromechanical systems (MEMS) technology is described. The device contains a number of shutter blades, which are each driven by a separate microactuator, and translated synchronously to create a variable polygonal aperture. The optical performance of devices with different numbers of blades is compared using simple analytic models and diffraction theory. The mechanism is simulated by finite element analysis. Four-blade devices driven by buckling mode electrothermal actuators are formed by double-sided patterning and deep reactive ion etching of bonded silicon-on-insulator and characterized experimentally. Symmetric deflections are obtained, and used to create a square pupil. Variable attenuation is demonstrated using optical fibres with thermally expanded cores.
- PACS
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85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
02.70.Dh Finite-element and Galerkin methods
85.80.Fi Thermoelectric devices
- Subjects
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Surfaces, interfaces and thin films
- Dates
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Issue 12 (December 2004)
Received 24 May 2004, in final form 27 July 2004
Published 14 September 2004
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Sliding-blade MEMS iris and variable optical attenuator
R R A Syms et al 2004 J. Micromech. Microeng. 14 1700
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