Quick search Find article
Quick search
Find article

Structural optimization of a large-displacement electromagnetic Lorentz force microactuator for optical switching applications

Jeong Sam Han1, Jong Soo Ko2 and Jan G Korvink1

Show affiliations


This paper discusses optimization of an electromagnetic microactuator for large-displacement optical switching. The microactuator used in this research is a laterally driven electromagnetic one that provides parallel actuation to the silicon substrate surface (in-plane motion) using the Lorentz force. When the microactuator is driven by the distributed Lorentz force induced along the arch-shaped leaf springs, a buckling phenomenon in two leaf springs enables a large displacement with a relatively small actuation load. An important design objective of a microactuator is to achieve a large displacement with a low actuating force. In this research, two optimization formulations have been performed to improve the displacement capabilities of the microactuator. In the first, the actuation load to obtain a specific displacement is minimized, subject to constraints on the first natural frequency and maximum allowable stress. In the second, the actuation displacement for a given actuation load is maximized, subject to the same constraints as in the first formulation. These optimizations have generated considerably improved designs, making the actuators capable of large-displacement actuations with small actuating loads.


PACS

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

42.79.Ta Optical computers, logic elements, interconnects, switches; neural networks

Subjects

Electronics and devices

Optics, quantum optics and lasers

Nanoscale science and low-D systems

Dates

Issue 11 (November 2004)

Received 19 May 2004, in final form 29 June 2004

Published 9 August 2004



Users also read

What's this?
This innovative new feature generates a list of articles 'also read' by other users based on them reading the original article. Article abstracts citations and references are all considered and weighted accordingly. We hope that this will help you find relevant papers for your research.

  1. Parametric study and optimization of a micro-optical switch with a laterally driven electromagnetic microactuator

View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.