Jeong Sam Han et al 2004 J. Micromech. Microeng. 14 1585 doi:10.1088/0960-1317/14/11/021
Jeong Sam Han1, Jong Soo Ko2 and Jan G Korvink1
Show affiliationsThis paper discusses optimization of an electromagnetic microactuator for large-displacement optical switching. The microactuator used in this research is a laterally driven electromagnetic one that provides parallel actuation to the silicon substrate surface (in-plane motion) using the Lorentz force. When the microactuator is driven by the distributed Lorentz force induced along the arch-shaped leaf springs, a buckling phenomenon in two leaf springs enables a large displacement with a relatively small actuation load. An important design objective of a microactuator is to achieve a large displacement with a low actuating force. In this research, two optimization formulations have been performed to improve the displacement capabilities of the microactuator. In the first, the actuation load to obtain a specific displacement is minimized, subject to constraints on the first natural frequency and maximum allowable stress. In the second, the actuation displacement for a given actuation load is maximized, subject to the same constraints as in the first formulation. These optimizations have generated considerably improved designs, making the actuators capable of large-displacement actuations with small actuating loads.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
42.79.Ta Optical computers, logic elements, interconnects, switches; neural networks
Issue 11 (November 2004)
Received 19 May 2004, in final form 29 June 2004
Published 9 August 2004
Jeong Sam Han et al 2004 J. Micromech. Microeng. 14 1585
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Alberto Accardi et al JHEP11(2009)093
J. A. Aguilar–Saavedra JHEP11(2009)030
A Picard 2006 Meas. Sci. Technol. 17 2540
Gregory Ryskin 2009 New J. Phys. 11 063015
Emilio Elizalde and Jaume Haro 2009 J. Phys. A: Math. Theor. 42 472001