Ilya Avdeev et al 2004 J. Micromech. Microeng. 14 1491 doi:10.1088/0960-1317/14/11/009
Ilya Avdeev, Miklos Gyimesi, Michael Lovell and Dale Ostergaard
Show affiliationsSignificant advances in MEMS fabrication technology has led to the ability to create devices and components that are geometrically complex. In order to optimize the performance of these increasingly complex components, efficient finite element modelling techniques are required to understand their coupled electromechanical behaviour. In the present investigation, a novel three-dimensional (3D) distributed strongly coupled electromechanical transducer finite element is introduced. Based on energy conservation principles, the element has internal morphing to accurately capture the underlying mechanical and electrostatic domains. To demonstrate the accuracy of the new element, several numerical examples are presented and compared to available experimental data. The range of applicability of the new element, as related to the design of MEMS devices, is subsequently discussed.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 11 (November 2004)
Received 15 March 2004, in final form 18 June 2004
Published 9 August 2004
Ilya Avdeev et al 2004 J. Micromech. Microeng. 14 1491
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