Sung-Sik Yun and Jong-Hyun Lee 2003 J. Micromech. Microeng. 13 721 doi:10.1088/0960-1317/13/5/326
Sung-Sik Yun and Jong-Hyun Lee
Show affiliationsThis paper presents a micromachined in-plane tunable optical filter using the thermo-optic effect of crystalline silicon. The device was fabricated by a silicon deep reactive ion etching process with a silicon-on-insulator wafer and thermal oxide removal to improve the sidewall smoothness. Optical fibers could be horizontally aligned on the fabricated TOF device by exploiting in-plane device structures, which enable TOFs to easily connect with other optical components. Tunability of the TOFs was experimentally achieved through thermal modulation of optical path length by heating the silicon etalon. As the input voltage increases, a notch in the reflectance spectrum shifts to a longer wavelength with an average tuning sensitivity of 0.9 nm K−1 and a best bandwidth of 1.1 nm. The proposed device can be utilized for spectroscopy or optical communication.
42.79.Ci Filters, zone plates, and polarizers
78.20.Nv Thermooptical and photothermal effects
42.81.Wg Other fiber-optical devices
81.65.Cf Surface cleaning, etching, patterning
42.79.Sz Optical communication systems, multiplexers, and demultiplexers
42.82.Cr Fabrication techniques; lithography, pattern transfer
Condensed matter: electrical, magnetic and optical
Surfaces, interfaces and thin films
Issue 5 (September 2003)
Received 4 February 2003, in final form 7 May 2003
Published 20 June 2003
Sung-Sik Yun and Jong-Hyun Lee 2003 J. Micromech. Microeng. 13 721
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