Carolina Ribbing et al 2003 J. Micromech. Microeng. 13 714 doi:10.1088/0960-1317/13/5/325
Carolina Ribbing1, Björn Cederström2 and Mats Lundqvist2
Show affiliationsSaw-tooth x-ray refractive lenses have been fabricated in silicon, epoxy and diamond. Silicon lenses were made by anisotropic wet etching of single crystalline silicon. Epoxy lenses were moulded from silicon masters. Diamond lenses were replicated by chemical vapour deposition on silicon masters and subsequent sacrificial etching of silicon. Beryllium saw-tooth test structures were embossed using a diamond master. Silicon and epoxy lenses gave sub-micron focal lines and provided gains of up to 40 when tested in a synchrotron set-up. Focal lengths ranged from 0.33 to 0.61 m for x-ray energies between 14 and 30 keV.
41.50.+h X-ray beam source magnets and x-ray optics for control of particle beams
42.82.Cr Fabrication techniques; lithography, pattern transfer
81.15.Gh Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.)
Accelerators, beams and electromagnetism
Issue 5 (September 2003)
Received 21 January 2003, in final form 12 May 2003
Published 20 June 2003
Carolina Ribbing et al 2003 J. Micromech. Microeng. 13 714
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