J G Rocha et al 2003 J. Micromech. Microeng. 13 S45 doi:10.1088/0960-1317/13/4/307
X-ray detector based on a bulk micromachined photodiode combined with a scintillating crystal
J G Rocha1, C G J Schabmueller2, N F Ramos1, S Lanceros-Mendez3, M F Costa3, A G R Evans2, R F Wolffenbuttel4 and J H Correia1
Show affiliationsIn this paper we report on the design, fabrication, assembly and testing of an x-ray detector based on a bulk micromachined photodiode (BMMPD) with a cavity filled with a scintillating crystal. The x-ray photons that reach the detector are first converted to visible light by the scintillating crystal. The visible light is then detected by the BMMPD, producing an electric current with a value proportional to the incident x-ray intensity. Tests were performed using two x-ray setups: an experimental setup and a professional setup. The first was powered with a maximum voltage of 35 kV, and a current ranging to 1 mA, and the second was powered with voltages from 40 to 60 kV and currents ranging from 10 to 55 mA.
- PACS
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85.60.Dw Photodiodes; phototransistors; photoresistors
07.85.Fv X- and gamma-ray sources, mirrors, gratings, and detectors
- Subjects
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Instrumentation and measurement
- Dates
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Issue 4 (July 2003)
Received 24 February 2003, in final form 15 April 2003
Published 13 June 2003
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X-ray detector based on a bulk micromachined photodiode combined with a scintillating crystal
J G Rocha et al 2003 J. Micromech. Microeng. 13 S45
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