Shuji Tanaka et al 2003 J. Micromech. Microeng. 13 502 doi:10.1088/0960-1317/13/3/321
Shuji Tanaka1, Takashi Yamada1, Shinya Sugimoto1, Jing-Feng Li2,4 and Masayoshi Esashi3
Show affiliationsIn this paper we describe silicon nitride (Si3N4) ceramic-based microdiffusion combustors with a two-dimensional structure, which is potentially batch-producible by microelectromechanical systems machining technology such as deep reactive ion etching. Si3N4 ceramic structures were fabricated by the nitridation of a spark-plasma-sintered silicon green compact after mechanical micromilling. Five types of combustor with a combustion chamber volume of 181 μl and depths of 1, 2 and 3 mm were tested. The combustors with combustion chamber depths of 2 or 3 mm achieved stable combustion at equivalence ratios from 0.28 to 1.3 and total flow rates from 4.0 to 11.3 SLM. They formed a flame at the center of the combustion chamber as designed, when the equivalence ratio was low. However, the combustor with a combustion chamber depth of 1 mm could not maintain a flame in the combustion chamber. This may be because combustion was not completed due to the shallow combustion chamber with a depth equivalent to the quenching distance of hydrogen.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Surfaces, interfaces and thin films
Nanoscale science and low-D systems
Issue 3 (May 2003)
Received 12 December 2002, in final form 12 March 2003
Published 15 April 2003
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