Quick search Find article
Quick search
Find article

Secondary resonances of electrically actuated resonant microsensors

Eihab M Abdel-Rahman and Ali H Nayfeh

Show affiliations


We investigate the response of a microbeam-based resonant sensor to superharmonic and subharmonic electric actuations using a model that incorporates the nonlinearities associated with moderately large displacements and electric forces. The method of multiple scales is used, in each case, to obtain two first-order nonlinear ordinary-differential equations that describe the modulation of the amplitude and phase of the response and its stability. We present typical frequency–response and force–response curves demonstrating, in both cases, the coexistence of multivalued solutions. The solution corresponding to a superharmonic excitation consists of three branches, which meet at two saddle-node bifurcation points. The solution corresponding to a subharmonic excitation consists of two branches meeting a branch of trivial solutions at two pitchfork bifurcation points. One of these bifurcation points is supercritical and the other is subcritical. The results provide an analytical tool to predict the microsensor response to superharmonic and subharmonic excitations, specifically the locations of sudden jumps and regions of hysteretic behavior, thereby enabling designers to safely use these frequencies as measurement signals. They also allow designers to examine the impact of various design parameters on the device behavior.


PACS

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

02.60.Lj Ordinary and partial differential equations; boundary value problems

07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

Subjects

Computational physics

Electronics and devices

Instrumentation and measurement

Nanoscale science and low-D systems

Dates

Issue 3 (May 2003)

Received 24 October 2002, in final form 4 March 2003

Published 15 April 2003



  1. Secondary resonances of electrically actuated resonant microsensors

    Eihab M Abdel-Rahman and Ali H Nayfeh 2003 J. Micromech. Microeng. 13 491

  2. Low-temperature specific heat study of amorphous and crystalline Co-Y alloys

    U Mizutani et al 1987 J. Phys. F: Met. Phys. 17 257

  3. First-principles quantum dynamics in interacting Bose gases: I. The positive P representation

    P Deuar and P D Drummond 2006 J. Phys. A: Math. Gen. 39 1163

  4. Commissioning of LIGO detectors

    Daniel Sigg 2004 Class. Quantum Grav. 21 S409

  5. Threshold ionization mass spectrometry in the presence of excited silane radicals

    T Moiseev et al 2009 J. Phys. D: Appl. Phys. 42 072003

  6. Experimental and numerical study of kinetic effects on the upper hybrid resonance cone

    T Pierre and G Leclert 1989 Plasma Phys. Control. Fusion 31 371

  7. Summaries of articles in this issue

    2008 J. Radiol. Prot. 28

  8. Ultraviolet and visible spectroscopies for tissue diagnostics: fluorescence spectroscopy and elastic-scattering spectroscopy

    Irving J Bigio and Judith R Mourant 1997 Phys. Med. Biol. 42 803

  9. Electronic Curves Crossing in Methyl Iodide by Spin–Orbit Ab Initio Calculation

    Li Rui et al 2008 Chinese Phys. Lett. 25 1644

  10. A fast inverse solver for the filtration function for flow of water with particles in porous media

    A C Alvarez et al 2006 Inverse Problems 22 69

Users also read

What's this?
This innovative new feature generates a list of articles 'also read' by other users based on them reading the original article. Article abstracts citations and references are all considered and weighted accordingly. We hope that this will help you find relevant papers for your research.

  1. Modeling and design of variable-geometry electrostatic microactuators
  2. Characterization of the mechanical behavior of an electrically actuated microbeam
  3. Dynamics of MEMS resonators under superharmonic and subharmonic excitations
More

View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.