E T Ong et al 2003 J. Micromech. Microeng. 13 482 doi:10.1088/0960-1317/13/3/319
E T Ong1, K H Lee2 and K M Lim2
Show affiliationsThe boundary element method is widely used in the electrostatic analysis of micro-electro-mechanical systems (MEMS) in order to determine the capacitance and electrostatic forces. However, the standard elements with low-order polynomial basis functions cannot produce accurate solutions in the vicinity of sharp corners and edges. This paper describes the formulation of new singular elements and their application to electromechanical coupling analysis. These singular elements are specially designed to handle the singularities in the potential gradient at sharp corners and edges, thereby improving the accuracy of the electrostatic analysis of the simulations of MEMS devices. Numerical simulations of micro-beam switches, comb-drive and micro-mirror are conducted, and the effects of using the singular elements are investigated.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
02.60.Lj Ordinary and partial differential equations; boundary value problems
Issue 3 (May 2003)
Received 21 October 2002, in final form 20 January 2003
Published 15 April 2003
E T Ong et al 2003 J. Micromech. Microeng. 13 482
Ananth N Bhoj and Mark J Kushner 2006 J. Phys. D: Appl. Phys. 39 1594
Germain Rousseaux et al 2008 New J. Phys. 10 053015
J C Martinez et al 2006 Eur. J. Phys. 27 805
H Araújo et al 2007 J. Phys.: Conf. Ser. 66 012003
A Ghasemi et al 2009 J. Phys.: Conf. Ser. 191 012016
Hejie Li et al 2004 Meas. Sci. Technol. 15 1285
Lei Ge and Jing Liu 2009 J. Phys.: Conf. Ser. 188 012019
B D Dudson et al 2005 Plasma Phys. Control. Fusion 47 885
J Güémez et al 2007 Eur. J. Phys. 28 1199