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Micromachined flow cytometers with embedded etched optic fibers for optical detection

Che-Hsin Lin1 and Gwo-Bin Lee2

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This paper presents a device that integrates a micromachined flow cytometer with two embedded etched optic fibers in order to carry out on-line detection of particles and cells. A simple and reliable fabrication process is used to fabricate the cytometer on soda-lime glass substrates. It is shown experimentally that particles/cells can be squeezed hydrodynamically into a narrow stream by two neighboring sheath flows such that they flow individually through a detection region. The resulting scattered light is then detected by etched optic fibers downstream. The proposed approach has the advantage that particles/cells can be counted without the need for fluorescent labeling or delicate optical alignment procedures. The current study confirms the success of the proposed microchip in the counting of polystyrene beads and human blood cells. The results also indicate that the intensity of the scattered light is proportional to the size of the particles/cells, which suggests that the proposed device may offer the potential to distinguish between particles/cells of different sizes.


PACS

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

87.19.rh Fluid transport and rheology

42.81.Pa Sensors, gyros

87.85.Va Micromachining

42.82.Cr Fabrication techniques; lithography, pattern transfer

87.17.-d Cell processes

Subjects

Electronics and devices

Optics, quantum optics and lasers

Medical physics

Biological physics

Nanoscale science and low-D systems

Dates

Issue 3 (May 2003)

Received 24 September 2002, in final form 18 March 2003

Published 11 April 2003



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