O Raccurt et al 2003 J. Micromech. Microeng. 13 442 doi:10.1088/0960-1317/13/3/314
O Raccurt1, F Tardif2, L Kerber1, T Lardin2 and T Vareine1
Show affiliationsA new rinsing process is proposed based on the conclusions obtained by simulations. It consists of a combination of piston flows and internal top-to-bottom recycling steps, which decreases the DI water consumption (and associated cost) for the same rinsing efficiency. This novel concept re-using the DI water in situ in the rinsing tank is demonstrated using an industrial bath recently proposed on the market.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 3 (May 2003)
Received 20 November 2002, in final form 24 February 2003
Published 27 March 2003
O Raccurt et al 2003 J. Micromech. Microeng. 13 442
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