Yongjun Zhao and Tianhong Cui 2003 J. Micromech. Microeng. 13 430 doi:10.1088/0960-1317/13/3/312
Yongjun Zhao and Tianhong Cui
Show affiliationsWe report on the formation of a lateral comb drive on poly-methyl-meth-acrylate (PMMA) using the hot embossing technique. A hot embossing mold insert is fabricated on a silicon wafer by means of lithography and inductive coupled plasma dry etching. The comb drive microstructure is hot embossed under a molding force of 35000 N at 130 °C. We demonstrate the comb drive, 80 units of interdigitated parallel capacitors with the finger gap and width both being 10 μm. The minimum feature size is 5 μm and the thickness of the structure is 60 μm, which makes the aspect ratio 12:1. The comb drive strokes 5 μm under an actuation potential of 180 V. We also present a brief description of the design and simulation with ANSYS.
Soft matter, liquids and polymers
Surfaces, interfaces and thin films
Issue 3 (May 2003)
Received 10 January 2003, in final form 24 February 2003
Published 18 March 2003
Yongjun Zhao and Tianhong Cui 2003 J. Micromech. Microeng. 13 430
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