A Q Liu et al 2003 J. Micromech. Microeng. 13 400 doi:10.1088/0960-1317/13/3/308
A Q Liu1, X M Zhang1, C Lu1, F Wang2, C Lu2 and Z S Liu2
Show affiliationsIn this paper, we develop optical and mechanical models of a surface micromachined variable optical attenuator (VOA) having an initial tilt angle. The proposed models are employed to compare various characteristics of the VOA such as snap-down voltage, attenuation versus driving voltage, and the rise time and the fall time based on the experimental data. In addition, the analytical models of the static and dynamic behavior of the drawbridge are verified using the results from the finite element method. We obtain reasonable accuracy between the results from the experiment and the proposed models.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
02.70.Dh Finite-element and Galerkin methods
42.79.Bh Lenses, prisms and mirrors
42.79.Sz Optical communication systems, multiplexers, and demultiplexers
Issue 3 (May 2003)
Received 27 September 2002, in final form 24 February 2003
Published 18 March 2003
A Q Liu et al 2003 J. Micromech. Microeng. 13 400
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