Hyoung J Cho and Chong H Ahn 2003 J. Micromech. Microeng. 13 383 doi:10.1088/0960-1317/13/3/306
Hyoung J Cho1 and Chong H Ahn2
Show affiliationsA magnetically-driven bi-directional optical microscanner has been designed, fabricated and characterized. Magnetic and structural modeling and analysis has been applied to the design of the scanner. The micromachined scanner can be operated bi-directionally under the condition of static operation. Under dynamic operation, the prototype scanner has shown stable bi-directional scanning performance at the operating frequency of 30 Hz, corresponding to 60 Hz in the regular uni-directional scanner. Compared with a conventional scanner, the microscanner has the advantages of low power consumption due to its small size and high scanning efficiency as a result of unique bi-directional actuation.
42.79.Ls Scanners, image intensifiers, and image converters
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
42.82.Bq Design and performance testing of integrated-optical systems
42.82.Cr Fabrication techniques; lithography, pattern transfer
Optics, quantum optics and lasers
Issue 3 (May 2003)
Received 26 November 2003, in final form 30 January 2003
Published 28 February 2003
Hyoung J Cho and Chong H Ahn 2003 J. Micromech. Microeng. 13 383
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