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Ta2O5- and TiO2-based nanostructures made by atomic layer deposition

Marianna Kemell1, Emma Härkönen, Viljami Pore, Mikko Ritala and Markku Leskelä

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Nanotubular Ta2O5- and TiO2-based structures were prepared by atomic layer deposition of Ta2O5 and TiO2 thin films, conformally on pore walls of porous alumina membranes. Both self-supporting alumina membranes and Si-supported thin-film membranes were studied as templates. Long Ta2O5 and TiO2 nanotubes were prepared successfully with the self-supporting membranes. The TiO2 nanotubes showed photocatalytic activity in methylene blue degradation under UV illumination. The Ta2O5 and TiO2 nanotubes were further modified by depositing Pt nanoparticles inside them. The Si-supported thin-film membranes were used as templates for the preparation of robust Ta2O5-coated Ni nanorod arrays on a Si substrate using electrodeposition, chemical etching and atomic layer deposition. In addition to photocatalysis, the nanostructures prepared in this work may find applications as other catalysts and as solid-state or electrochemical capacitors.


PACS

81.15.Pq Electrodeposition, electroplating

82.45.Yz Nanostructured materials in electrochemistry

82.45.Mp Thin layers, films, monolayers, membranes

81.16.Hc Catalytic methods

68.37.Hk Scanning electron microscopy (SEM) (including EBIC)

61.46.Fg Nanotubes

Subjects

Surfaces, interfaces and thin films

Nanoscale science and low-D systems

Chemical physics and physical chemistry

Dates

Issue 3 (22 January 2010)

Received 10 September 2009, in final form 12 November 2009

Published 7 December 2009



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