K B Mogensen et al 2009 Nanotechnology 20 095503 doi:10.1088/0957-4484/20/9/095503
K B Mogensen1, L Gangloff2, P Boggild1, K B K Teo2, W I Milne2 and J P Kutter1
Show affiliationsA fabrication process for monolithic integration of vertically aligned carbon nanotubes in electrically insulated microfluidic channels is presented. A 150 nm thick amorphous silicon layer could be used both for anodic bonding of a glass lid to hermetically seal the microfluidic glass channels and for de-charging of the wafer during plasma enhanced chemical vapor deposition of the carbon nanotubes. The possibility of operating the device with electroosmotic flow was shown by performing standard electrophoretic separations of 50 µM fluorescein and 50 µM 5-carboxyfluorescein in a 25 mm long column containing vertical aligned carbon nanotubes. This is the first demonstration of electroosmotic pumping and electrokinetic separations in microfluidic channels with a monolithically integrated carbon nanotube forest.
52.77.Dq Plasma-based ion implantation and deposition
81.16.-c Methods of nanofabrication and processing
Soft matter, liquids and polymers
Issue 9 (4 March 2009)
Received 9 September 2008, in final form 19 December 2008
Published 11 February 2009
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