Zhiyu Ren et al 2009 Nanotechnology 20 065305 doi:10.1088/0957-4484/20/6/065305
Zhiyu Ren1,2, Xuemin Zhang1, Junhu Zhang1, Xiao Li1 and Bai Yang1
Show affiliationsThis paper describes a simple method of sculpturing cavities in silica spheres by reactive ion etching using a polymer as the mask, and investigates the changing process in detail. The morphology of the cavity in the silica structure undergoes transformation in three steps: (1) increase of the diameters of the opening of the cavities; (2) increase of the depth of the cavities; and (3) change in geometry of the resulting structure. As a result, silica bowls or silica rings could be obtained by controlling the etching stage, and this approach can be extended to a wide range, from a micrometer to a nanometer, based on the silica spheres.
Issue 6 (11 February 2009)
Received 26 September 2008, in final form 28 October 2008
Published 14 January 2009
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