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Structural and chemical characterization of TiO2 memristive devices by spatially-resolved NEXAFS

John Paul Strachan1, J Joshua Yang1, Ruth Münstermann1, Andreas Scholl2, Gilberto Medeiros-Ribeiro1, Duncan R Stewart1 and R Stanley Williams1

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We used spatially-resolved NEXAFS (near-edge x-ray absorption fine structure) spectroscopy coupled with microscopy to characterize the electronic, structural and chemical properties of bipolar resistive switching devices. Metal/TiO2/metal devices were electroformed with both bias polarities and then physically opened to study the resulting material changes within the device. Soft x-ray absorption techniques allowed isolated study of the different materials present in the device with 100 nm spatial resolution. The resulting morphology and structural changes reveal a picture of localized polarity-independent heating occurring within these devices initiated by and subsequently accelerating polarity-dependent electrochemical reduction/oxidation processes.


PACS

85.30.De Semiconductor-device characterization, design, and modeling

84.30.Sk Pulse and digital circuits

82.45.Vp Semiconductor materials in electrochemistry

73.40.Rw Metal-insulator-metal structures

78.70.Dm X-ray absorption spectra

Subjects

Condensed matter: electrical, magnetic and optical

Electronics and devices

Semiconductors

Surfaces, interfaces and thin films

Chemical physics and physical chemistry

Dates

Issue 48 (2 December 2009)

Received 25 June 2009, in final form 17 September 2009

Published 30 October 2009



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