R Krishnan et al 2009 Nanotechnology 20 465609 doi:10.1088/0957-4484/20/46/465609
The formation of vertically aligned biaxial tungsten nanorods using a novel shadowing growth technique
R Krishnan1, T Parker2, S Lee3 and T-M Lu2
Show affiliationsBiaxially textured tungsten nanorods (A15 crystal structure) have been grown by oblique angle DC magnetron sputtering using a novel rotation mode called 'two-step rotation'. In this mode, the substrate is given a fast rotation through 180° at 90 rpm and this is followed by a rest period of 30 s. These nanorods are vertically aligned and have a [100] texture normal to the substrate along with preferential in-plane texture as shown by x-ray pole figure analysis. In contrast, the tungsten nanorods obtained without substrate rotation are slanted at an angle of ~45° and have a [100] texture tilted 16° with respect to the substrate normal. The flux is incident from two diametrically opposite points on the sample at an oblique angle, averaging out the growth into vertical columns that retain the in-plane texture. Scanning electron microscopy shows that the tungsten nanorods have a mixture of {211} and {421} crystal habits; these planes are both minimum surface energy planes for a cubic A15 crystal structure.
- PACS
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81.16.-c Methods of nanofabrication and processing
61.46.-w Structure of nanoscale materials
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
81.07.-b Nanoscale materials and structures: fabrication and characterization
- Subjects
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Surfaces, interfaces and thin films
- Dates
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Issue 46 (18 November 2009)
Received 27 August 2009, in final form 28 September 2009
Published 22 October 2009
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The formation of vertically aligned biaxial tungsten nanorods using a novel shadowing growth technique
R Krishnan et al 2009 Nanotechnology 20 465609
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