Quick search Find article
Quick search
Find article

Quantitative dielectric constant measurement of thin films by DC electrostatic force microscopy

G Gramse1, I Casuso2, J Toset1, L Fumagalli1 and G Gomila1

Show affiliations


A simple method to measure the static dielectric constant of thin films with nanometric spatial resolution is presented. The dielectric constant is extracted from DC electrostatic force measurements with the use of an accurate analytical model. The method is validated here on thin silicon dioxide films (8 nm thick, dielectric constant~4) and purple membrane monolayers (6 nm thick, dielectric constant~2), providing results in excellent agreement with those recently obtained by nanoscale capacitance microscopy using a current-sensing approach. The main advantage of the force detection approach resides in its simplicity and direct application on any commercial atomic force microscope with no need of additional sophisticated electronics, thus being easily available to researchers in materials science, biophysics and semiconductor technology.


PACS

77.22.Ch Permittivity (dielectric function)

61.46.-w Structure of nanoscale materials

77.55.+f Dielectric thin films

68.37.Ps Atomic force microscopy (AFM)

Subjects

Condensed matter: electrical, magnetic and optical

Surfaces, interfaces and thin films

Nanoscale science and low-D systems

Dates

Issue 39 (30 September 2009)

Received 4 June 2009, in final form 20 July 2009

Published 2 September 2009



Related review articles

What's this?
View review articles related to this research to gain an insight into the key trends in this subject area. Related review articles are selected based on PACS/MSC codes, and are no more than three years old.

  1. Local polarization dynamics in ferroelectric materials
  2. Techniques for measuring the microwave dielectric properties of materials

View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.