B Päivänranta et al 2009 Nanotechnology 20 375301 doi:10.1088/0957-4484/20/37/375301
B Päivänranta, T Saastamoinen and M Kuittinen
Show affiliationsA surface consisting of periodically arranged nanopyramids producing wide-angle broad-band antireflection properties is presented. The reflectance of silicon dioxide is reduced below 0.45% over the visible spectral range (380–760 nm) for viewing angles from 0° to 40°. The surface is designed by using rigorous diffraction theory and fabricated first in silicon by exploiting its strong crystalline orientation and by using the wet etching process. The structure is transferred from silicon to transparent silicon dioxide by using nano-imprint lithography and proportional reactive ion etching.
78.67.-n Optical properties of low-dimensional, mesoscopic, and nanoscale materials and structures
Condensed matter: electrical, magnetic and optical
Issue 37 (16 September 2009)
Received 9 April 2009, in final form 4 August 2009
Published 26 August 2009
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