Tsung-Yen Tsai et al 2009 Nanotechnology 20 305303 doi:10.1088/0957-4484/20/30/305303
Tsung-Yen Tsai, Tsung-Han Chen, Nyan-Hwa Tai, Shih-Chin Chang, Hui-Chen Hsu and Thomas Joseph Palathinkal
Show affiliationsA new method for the fabrication of periodic CNT arrays was developed in this study, which involves the use of the inverse nano-sphere lithography (INSL) process. Mo of a honeycomb pattern, acting as a catalyst-poisoning layer, was produced by the nano-sphere lithography (NSL) process; the Mo poisoned the catalyst and prevented CNT growth where deposited, and as a result, a periodic CNT pattern was obtained. Using this method, the uniformity of the CNT array can be improved by preventing the negative effect of arrangement defects in self-assembled monolayers. The size and the period of the CNT array can be adjusted by careful selection of the polystyrene (PS) sphere diameter. X-ray photoelectron spectroscope (XPS) analysis revealed that the Co catalyst was ineffective on the areas of Mo deposition due to the diffusion of Co into the Mo layer.
79.60.Jv Interfaces; heterostructures; nanostructures
Condensed matter: electrical, magnetic and optical
Surfaces, interfaces and thin films
Issue 30 (29 July 2009)
Received 16 March 2009, in final form 3 June 2009
Published 7 July 2009
Tsung-Yen Tsai et al 2009 Nanotechnology 20 305303
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