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The fabrication of periodic metal nanodot arrays through pulsed laser melting induced fragmentation of metal nanogratings

Qiangfei Xia and Stephen Y Chou1

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We propose and demonstrate a new method for fabricating periodic arrays of metal nanodots over a large area. In this method, metal nanogratings were first patterned on a substrate by nanoimprint lithography and lift-off, and were then melted using a single excimer laser pulse. We found that the laser melting broke the metal nanogratings into periodic nanodots. Furthermore, we demonstrated the control of the nanodot array pitch using a substrate surface topology, and the fabrication of two-dimensional periodic metal nanodot arrays of 70 nm diameter and 200 nm period. The fragmentation of lines into dots was attributed to the Rayleigh instability in a liquid cylinder.


PACS

81.16.Nd Nanolithography

81.16.Pr Nanooxidation

81.16.Mk Laser-assisted deposition

81.07.-b Nanoscale materials and structures: fabrication and characterization

Subjects

Nanoscale science and low-D systems

Dates

Issue 28 (15 July 2009)

Received 16 March 2009, in final form 29 April 2009

Published 23 June 2009



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