Qiangfei Xia and Stephen Y Chou 2009 Nanotechnology 20 285310 doi:10.1088/0957-4484/20/28/285310
Qiangfei Xia and Stephen Y Chou1
Show affiliationsWe propose and demonstrate a new method for fabricating periodic arrays of metal nanodots over a large area. In this method, metal nanogratings were first patterned on a substrate by nanoimprint lithography and lift-off, and were then melted using a single excimer laser pulse. We found that the laser melting broke the metal nanogratings into periodic nanodots. Furthermore, we demonstrated the control of the nanodot array pitch using a substrate surface topology, and the fabrication of two-dimensional periodic metal nanodot arrays of 70 nm diameter and 200 nm period. The fragmentation of lines into dots was attributed to the Rayleigh instability in a liquid cylinder.
81.16.Mk Laser-assisted deposition
81.07.-b Nanoscale materials and structures: fabrication and characterization
Issue 28 (15 July 2009)
Received 16 March 2009, in final form 29 April 2009
Published 23 June 2009
Qiangfei Xia and Stephen Y Chou 2009 Nanotechnology 20 285310
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