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The fabrication of ZnO nanowire field-effect transistors combining dielectrophoresis and hot-pressing

Yi-Kuei Chang1 and Franklin Chau-Nan Hong1,2,3

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Zinc oxide nanowire field-effect transistors (NW-FETs) were fabricated combining the dielectrophoresis (DEP) and the hot-pressing methods. DEP was used to position both ends of the nanowires on top of the source and the drain electrodes, respectively. Hot-pressing of nanowires on the electrodes was then employed to ensure good contacts between the nanowires and the electrodes. The good device performance achieved with our method of fabrication indicates that DEP combined with hot-pressing has the potential to be applied to the fabrication of flexible electronics on a roll-to-roll basis.


PACS

85.30.Tv Field effect devices

81.05.Dz II-VI semiconductors

81.20.Ev Powder processing: powder metallurgy, compaction, sintering, mechanical alloying, and granulation

81.07.-b Nanoscale materials and structures: fabrication and characterization

82.45.Fk Electrodes

Subjects

Electronics and devices

Semiconductors

Nanoscale science and low-D systems

Condensed matter: structural, mechanical & thermal

Chemical physics and physical chemistry

Dates

Issue 23 (10 June 2009)

Received 8 February 2009, in final form 9 April 2009

Published 18 May 2009



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