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Scanning thermal imaging by near-field fluorescence spectroscopy

Elika Saïdi1, Benjamin Samson1, Lionel Aigouy1, Sebastian Volz2, Peter Löw3,4, Christian Bergaud3,4 and Michel Mortier5

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A scanning thermal microscope that uses a fluorescent particle as a temperature probe has been developed. The particle, made of a rare-earth ion-doped fluoride glass, is glued at the extremity of a sharp tungsten tip and scanned on the surface of an electronic device. The temperature of the device is determined by measuring the fluorescence spectrum of the particle at every point on the surface and by comparing the intensity variations of two emission lines. As an example, we will show some images obtained on a nickel stripe 1 µm wide, heated by an electrical current. A good agreement is observed with a simulation of the temperature field on the device.


PACS

07.79.-v Scanning probe microscopes and components

68.37.-d Microscopy of surfaces, interfaces, and thin films

Subjects

Instrumentation and measurement

Surfaces, interfaces and thin films

Dates

Issue 11 (18 March 2009)

Received 10 December 2008, in final form 19 January 2009

Published 25 February 2009



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