Hua Qin et al 2008 Nanotechnology 19 095504 doi:10.1088/0957-4484/19/9/095504
Hua Qin1, Hyun-Seok Kim and Robert H Blick
Show affiliationsA new transmission-type electron multiplier was fabricated from silicon-on-insulator (SOI) material by integrating an array of one-dimensional (1D) silicon nanopillars onto a two-dimensional (2D) silicon membrane. Primary electrons are injected into the nanopillar–membrane (NPM) system from the flat surface of the membrane, while electron emission from the nanopillars is probed by an anode. The secondary electron yield (SEY) from the nanopillars in the current device is found to be about 1.8 times that of the plain silicon membrane. This gain in electron number is slightly enhanced by the electric field applied from the anode. Further optimization of the dimensions of the NPM and an application of field emission promise an even higher gain for detector applications and allow for probing of electronic/mechanical excitations in an NPM system stimulated by incident particles or radiation.
79.20.Hx Electron impact: secondary emission
73.30.+y Surface double layers, Schottky barriers, and work functions
79.70.+q Field emission, ionization, evaporation, and desorption
Condensed matter: electrical, magnetic and optical
Issue 9 (5 March 2008)
Received 5 October 2007
Published 11 February 2008
Hua Qin et al 2008 Nanotechnology 19 095504
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