Joondong Kim et al 2008 Nanotechnology 19 485713 doi:10.1088/0957-4484/19/48/485713
Joondong Kim1, Young-Hyun Shin1, Ju-Hyung Yun1, Chang-Soo Han1, Moon Seop Hyun2 and Wayne A Anderson3
Show affiliationsAn electric conductive Ni silicide nanowire (NiSi NW) embedding electric force microscopy (EFM) tip was fabricated by the dielectrophoretic method and was used to obtain electric information. Due to the geometric and electric excellence, the NiSi NW provides advantages in imaging and fabrication of the microscopy tip.
A lead zirconate titanate (PZT) ferroelectric thin film was positively and negatively polarized, and the polarities were obtained by probing of the NiSi NW EFM tip to give distinctive charging information of the PZT film. Moreover, the NiSi NW EFM probing was adopted to achieve the electrical signal from the NW interconnect. The NiSi NW EFM probe confirmed the uniform electric-potential distribution through the NiSi NW interconnect with a small standard deviation. This demonstrates the feasibility of functional utilizations of the NiSi NW.
81.16.Be Chemical synthesis methods
77.84.Dy Niobates, titanates, tantalates, PZT ceramics, etc.
77.55.+f Dielectric thin films
81.07.-b Nanoscale materials and structures: fabrication and characterization
73.63.-b Electronic transport in nanoscale materials and structures
Condensed matter: electrical, magnetic and optical
Issue 48 (3 December 2008)
Received 1 September 2008, in final form 29 September 2008
Published 12 November 2008
Joondong Kim et al 2008 Nanotechnology 19 485713
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