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Using direct nanoimprinting of ferroelectric films to prepare devices exhibiting bi-directionally tunable surface plasmon resonances

H L Chen1,4, K C Hsieh1, C H Lin2 and S H Chen3

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In this paper, we describe an imprint method for the fabrication of bi-directionally tunable surface plasmon resonance (SPR) filters. A periodic metal/ferroelectric film stack exhibiting SPR phenomena was directly imprinted using a sharp mold without the need for a polymer-based resist. Both the refractive index of the surrounding lead zirconate titanate (PZT) films and the period of the textured PZT/metal/PZT structure were dependent upon both the absolute value and sign of the applied potential. The SPR wavelength of the PZT/gold/PZT-based tunable filter varied over a range of greater than 100 nm when applying potentials ranging from 0 to −15 V. This imprinting method has great potential for use in the fabrication of tunable optical filters without the need for complicated processes or specific materials.


PACS

42.79.Ci Filters, zone plates, and polarizers

78.20.Ci Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)

77.84.Dy Niobates, titanates, tantalates, PZT ceramics, etc.

42.82.Cr Fabrication techniques; lithography, pattern transfer

Subjects

Condensed matter: electrical, magnetic and optical

Optics, quantum optics and lasers

Dates

Issue 43 (22 October 2008)

Received 28 May 2008, in final form 14 August 2008

Published 22 September 2008



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