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3D finite element analysis of electrostatic deflection and shielding of commercial and FIB-modified cantilevers for electric and Kelvin force microscopy: II. Rectangular shaped cantilevers with asymmetric pyramidal tips

Giovanni Valdrè and Daniele Moro

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This paper deals with an application of 3D finite element analysis to the electrostatic interaction between (i) a commercial rectangular shaped cantilever (with an integrated anisotropic pyramidal tip) and a conductive sample, when a voltage difference is applied between them, and (ii) a focused ion beam (FIB) modified cantilever in order to realize a probe with reduced parasitic electrostatic force. The 3D modelling of their electrostatic deflection was realized by using multiphysics finite element analysis software and applied to the real geometry of the cantilevers and probes as used in conventional electric and Kelvin force microscopy to evaluate the contribution of the various part of a cantilever to the total force, and derive practical criteria to optimize the probe performances. We report also on the simulation of electrostatic shielding of nanometric features, in order to quantitatively evaluate an alternative way of reducing the systematic error caused by the cantilever-to-sample capacitive coupling. Finally, a quantitative comparison between the performances of rectangular and triangular cantilevers (part I of this work) is reported.


PACS

07.10.Cm Micromechanical devices and systems

02.70.Dh Finite-element and Galerkin methods

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

Subjects

Computational physics

Electronics and devices

Instrumentation and measurement

Nanoscale science and low-D systems

Dates

Issue 40 (8 October 2008)

Received 8 April 2008, in final form 8 July 2008

Published 20 August 2008



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